Piezo Nanopositioning Stage, Linear Piezo Stage with High Accuracy Positioning Accuracy for Nanopositioning
Z axis Vertical piezo positioner linear stage with fast piezo focus matching Olympus microscope piezo stage
·Piezo stage
·piezo positioner
·linear stage
|
Models |
Suffix S-Closed loop |
P79.Z100S P79.Z100K |
P79.Z200S P79.Z200K |
Units |
|
Active axis |
Z |
Z |
|
|
|
Travel range(0~120V) |
80 |
150 |
μm±20% |
|
|
Travel range(0~150V) |
100 |
187.5 |
μm±20% |
|
|
Sensor type |
SGS/- |
SGS/- |
|
|
|
Aperture size |
128.5×86.5 |
128.5×86.5 |
mm |
|
|
Resolution |
7/3 |
8/5 |
nm |
|
|
Linearity |
0.1/- |
0.15/- |
%F.S |
|
|
Repeatability |
0.05/- |
0.1/- |
%F.S |
|
|
Picth/yaw/roll |
<15 |
<20 |
μrad |
|
|
Push/pull force |
30/15 |
42/18 |
N |
|
|
Stiffness in motion direction |
0.3 |
0.2 |
N/μm±20% |
|
|
Unloaded resonant frequency |
200 |
150 |
Hz±20% |
|
|
Unloaded step time |
15/3.2 |
25/5 |
ms±20% |
|
|
Closed-loop unloaded operating frequency |
10% travel |
50 |
25 |
Hz±20% |
|
100% travel |
15 |
5 |
||
|
Load capacity |
2 |
1.5 |
kg |
|
|
El.capacitance |
5.4 |
11 |
μF±20% |
|
|
Material |
Steel, Al |
Steel, Al |
|
|
|
Mass |
700 |
800 |
g±5% |
|
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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