6 Axes Nanopositioning Stages From CoreMorrow Piezo Stage
H60 Series Piezo Hexapods is a piezo stage with six-axis motion of θx, θy, θz, X, Y, and Z. The six-degree-of-freedom movement in space is realized by the coordinated expansion and contraction of six piezoelectric actuators. The closed-loop model has high positioning accuracy. It is suited for applications such as six-degree-of-freedom micro-operation and micro-electronic precision machining.
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