Full Automatic High Vacuum Thermal Evaporation Coating System ET-EVAP400C-1
Main Vacuum Chamber
Rectangle 304 Stainless steel chamber, Size: 400mm×400mm×450mm. The front door is full auto control (integrated with glove box), the outside door is hinged type for service. The two doors are provided with an observation window. The chamber is provided with a lighting and film thickness instrument and another equipment interface.
Vacuum System
Pumping by turbo-molecular pump (pumping speed 1200L/S) + Joint venture direct coupling rotary vane pump (pumping speed 9L/S), high vacuum electro-pneumatic valves, full automatic control
Ultimate Vacuum
≤6×10-5Pa
Pumping Speed
Pumping from air to 9×10-4Pa≤30min（short time expose in the air, feeding dry Nitrogen, then starting vacuum）
Substrate system
Sample Size
Drawer type structure, carrying a maximum of less than 120 x 120mm samples, equipped with Japan SMC pneumatic substrate baffle, electrical linkage fully automatic control
Moving Mode
• The substrate table adopts the magnetic fluid seal, which can be lifted and lifted, and the distance between the source and the substrate can be adjusted continuously by 200~300mm.；
• The substrate table can rotate continuously, and the rotating speed is 0~30
• Above processing are full auto control
Heating
Room temperature ~300℃, Japan SHIMADEN PID intelligence temperature control system
thermal source
Metal Thermal
Source
2units, Water cooling pure cooper electrodes+ thermal boat
Organic Thermal Source
sing PID temperature organic beam source furnace, the crucible is larger than 2CC, room temperature of ~300 ℃, continuously adjustable
Thermal power
Metal Thermal Power
Current 300A, maximum output power 3KW（Conversion for two sets of alternating evaporation）
Organic Thermal Source
PID Intelligent temperature controlled evaporation power supply (temperature control accuracy±1℃）
Coating Thickness Control System
The quartz crystal film thickness controller, monitoring the thickness of the display range: 0-99μ9999Å
Water Cooling System
Equipped with cooling water circulation machine, the user only need to provide the site
Alarm & Protect System
Perfect logic program interlock and protection system, the pump, electrode and other water shortage, over current over-voltage, open circuit and other abnormal alarm and the implementation of the corresponding protection measures
Coating thickness non-uniformity
Φ100mm≤±5.0%
Glove box System
Glove Box chamber
Chamber size: 1500×750×900mm
Main antechamber:¢360×600mm，mini-chamber: ¢150×300mm
Height of stand: 950mm
Gas purify System
Moisture & oxygen <1ppm
Single Column Purification System
Solvent Purification System
GE US brand moisture & oxygen analyzer
Control mode
PLC+PC full auto control
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