Tantalum Plates Targets
Product Name: tantalum sputtering targetExecution standard: B708-98Specifications: diameter of circular target (25-400) mm (3-28) mm * thicknessSquare target specifications: thickness (1-12.7) of mm* (10-600) mm* length width (200-2000) mmTolerance: the diameter tolerance of + / - 0.254Brand: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)Purity: 99.9%Recrystallization: at least 95%Grain size: minimum 40 mSurface roughness: Ra 0.8 maximumFlatness: or 0.1mm 0.10% maximum.Tantalum plates targetsChemical compostionGrMain others Max%TaNbFeSiNiWMoTiNbOCHNTa1remind——0.0050.0050.0020.010.010.0020.040.020.010.00150.01Ta2remind——0.030.020.0050.040.030.0050.10.030.010.00150.01TaNb3remind＜3.50.030.030.0050.040.030.005——0.030.010.00150.01TaNb20remind17.0～23.00.030.030.0050.040.030.005——0.030.010.00150.01Ta2.5Wremind0.0050.0050.0023.00.010.0020.040.020.010.00150.01Ta10Wremind0.0050.0050.002110.010.0020.040.020.010.00150.01
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