High density and high uniformity Al2O3 target-Alumina target
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AL2O3 target target (MAT-CN) |
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Physical properties |
Color |
silver |
|
Density |
-g/m³ |
|
|
Melting point |
- |
|
|
Technical indicators |
purity |
99.99% |
|
Relative density |
>99.9% |
|
|
Cut surface flatness |
3.2Ra |
|
|
Tolerance |
±0.1mm |
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|
grain size |
uniform |
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