RF microwave high frequency alumina thin film circuit
Photolithography and Etching
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Positive Resist
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Wet etching available for Au, TiW, Ta, NiCr, Ni, Cu, Ti, SiO2
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Minimum Geometrical Etching
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Conductors: 0.6 mils (0.1 tolerance)
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Resistors: 0.2 mils (0.04)
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