kokusai 2KVOPEX-MM
AboutKokusai Electric
Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.
Products &Systems
Batch Processing Systems
★High Quality & High Performance Thermal Processing System“TSURUGI-C²
★High-productivity Batch Processing System“AdvancedAce®-300”
★Batch High Temperature Anneal Processing System
★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”
Single Wafer Processing System
★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”
★Single wafer Annealing system“TANDUO®”
★Dry Resist Strip System“Lambda300”
Advanced Thermal Process Technology
Overview
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
Features
Excellent step coverage
Precise Film Property Control
Low Temperature Deposition
Good film thickness uniformity
Low Contamination
Recommend
| 140CPU67160S | 505-4232 | 140CRA21110 |
| 140CPU67260 | 505-4232A | 140CRA21220 |
| 140CPU67861 | 505-4332 | 140CRA31200 |
| 505-4532 | 140CRP93100 | 140CRA93100 |
| 505-4632 | 140CRP93200 | 6AR1304-0CA00-0AA0 |
| 505-4732 | 140DAI55300 | 6AR1306-0DC00-0AA0 |
| 505-4832 | 6155R-14S2KH | 6AV3607-1JC20-0AX1 |
| 140CRA93200 | 505-4916A | 6AV3627-1QL00-0AX0 |
| 140CRP31200 | 505-6108 | 140DAO84000 |
| 140CRP81100 | 505-6108A | 140DAO84210 |
| 505-6208 | 140DDI35300 | 560-2136 |
| 505-6660B | 140DDI35310 | 562-001 |
| 505-7003 | 6AA6504-0AA | 140DAI75300 |
| 140DAI74000 | 5136-DNS-200S | 549-214 |
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