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kokusai 3MOT000353

AboutKokusai Electric

Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System“AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”

★Single wafer Annealing system“TANDUO®”

★Dry Resist Strip System“Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

Recommend

140CPU67160S 505-4232 140CRA21110
140CPU67260 505-4232A 140CRA21220
140CPU67861 505-4332 140CRA31200
505-4532 140CRP93100 140CRA93100
505-4632 140CRP93200 6AR1304-0CA00-0AA0
505-4732 140DAI55300 6AR1306-0DC00-0AA0
505-4832 6155R-14S2KH 6AV3607-1JC20-0AX1
140CRA93200 505-4916A 6AV3627-1QL00-0AX0
140CRP31200 505-6108 140DAO84000
140CRP81100 505-6108A 140DAO84210
505-6208 140DDI35300 560-2136
505-6660B 140DDI35310 562-001
505-7003 6AA6504-0AA 140DAI75300
140DAI74000 5136-DNS-200S 549-214



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