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kokusai 5UOT161573

AboutKokusai Electric

Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System“AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”

★Single wafer Annealing system“TANDUO®”

★Dry Resist Strip System“Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

P0930EG Console Bay, Cover, Upper Rear

P0930EK Console Bay, Brace, Arms

P0930EU Console Wedge, Cover, Rear

P0930EV Console Wedge, Weldment

P0930EY Trim Panel Molding, Left

P0930FC Bracket, Wire Way, Left

P0930FD Bracket, Wire Way, Right

P0930FE Wire Way, Bay To End Table, Left

P0930FF Wire Way, Bay To End Table, Right

P0930FG Bracket, Bay To Bay

P0930FH Display Surface, 1 Annunciator

P0930FK Trim Panel Molding, Right



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