Laboratory 3D Surface Topography Profiler

Whats/App: +86 156 1874 6768

Web: standard-groups.com

Standards

The system’s analysis capabilities and software design support surface metrology requirements defined in relevant international standards, including but not limited to:

ISO 25178 (Surface texture: Areal)

ISO 4287 / ISO 4288 (Surface roughness parameters and evaluation)

ISO 16610 (Filtration of surface texture)

ISO standards for optical surface measurement and reporting

Parameters

Parameter	Specification
Imaging speed	High-speed camera up to 200 FPS
Z-axis resolution	Sub-nanometer resolution, independent of objective magnification or scan range
Imaging technologies	White light interferometry, confocal, spectral film thickness, bright field, dark field, zoom imaging, AFM
XY stage	Modular precision XY stage, customizable up to 300 × 300 mm
Sample compatibility	Wafers, devices, thin films, components, large-area samples
Software	ISO-compliant analysis software with automated measurement and reporting

Features

Six-in-one integrated imaging and analysis platform

High-speed camera enabling rapid surface acquisition

Sub-nanometer vertical resolution for precise height measurement

Modular and scalable platform for large-area samples

High-resolution spinning disk confocal scanning for fast area imaging

Physical suppression of scattered light to improve image contrast and accuracy

Advanced software for automated analysis and standardized report generation

Accessories

Precision modular XY stage (up to 300 × 300 mm)

High-speed imaging camera

Confocal scanning module

White light interferometry module

Thin film thickness measurement module

AFM measurement module

Test Procedures

Mount the sample securely on the precision XY stage according to its size and geometry.

Select the appropriate imaging mode based on surface characteristics, such as confocal, white light interferometry, or dark field.

Configure scanning parameters including scan area, resolution, and acquisition speed through the analysis software.

Perform surface scanning using the selected imaging technology.

Process the acquired data using automated analysis tools to extract surface morphology, roughness, or thickness information.

Generate standardized measurement reports directly from the software.

Maintenance Information

Keep optical components clean to maintain measurement accuracy and image quality.

Periodically inspect the XY stage and motion system for smooth operation.

Ensure the system operates within the specified environmental conditions.

Perform routine software updates and calibration as recommended to maintain compliance with measurement standards.

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