Laboratory 3D Surface Topography Profiler
Whats/App: +86 156 1874 6768
Web: standard-groups.com
Standards
The system’s analysis capabilities and software design support surface metrology requirements defined in relevant international standards, including but not limited to:
ISO 25178 (Surface texture: Areal)
ISO 4287 / ISO 4288 (Surface roughness parameters and evaluation)
ISO 16610 (Filtration of surface texture)
ISO standards for optical surface measurement and reporting
Parameters
| Parameter | Specification |
|---|---|
| Imaging speed | High-speed camera up to 200 FPS |
| Z-axis resolution | Sub-nanometer resolution, independent of objective magnification or scan range |
| Imaging technologies | White light interferometry, confocal, spectral film thickness, bright field, dark field, zoom imaging, AFM |
| XY stage | Modular precision XY stage, customizable up to 300 × 300 mm |
| Sample compatibility | Wafers, devices, thin films, components, large-area samples |
| Software | ISO-compliant analysis software with automated measurement and reporting |
Features
Six-in-one integrated imaging and analysis platform
High-speed camera enabling rapid surface acquisition
Sub-nanometer vertical resolution for precise height measurement
Modular and scalable platform for large-area samples
High-resolution spinning disk confocal scanning for fast area imaging
Physical suppression of scattered light to improve image contrast and accuracy
Advanced software for automated analysis and standardized report generation
Accessories
Precision modular XY stage (up to 300 × 300 mm)
High-speed imaging camera
Confocal scanning module
White light interferometry module
Thin film thickness measurement module
AFM measurement module
Test Procedures
Mount the sample securely on the precision XY stage according to its size and geometry.
Select the appropriate imaging mode based on surface characteristics, such as confocal, white light interferometry, or dark field.
Configure scanning parameters including scan area, resolution, and acquisition speed through the analysis software.
Perform surface scanning using the selected imaging technology.
Process the acquired data using automated analysis tools to extract surface morphology, roughness, or thickness information.
Generate standardized measurement reports directly from the software.
Maintenance Information
Keep optical components clean to maintain measurement accuracy and image quality.
Periodically inspect the XY stage and motion system for smooth operation.
Ensure the system operates within the specified environmental conditions.
Perform routine software updates and calibration as recommended to maintain compliance with measurement standards.
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