Chemical Mechanical Polisher
Get a quote：
Whats/App: +86 181 0160 0864
Web: gellowen.co.uk
Chemical Mechanical Polisher is a precision polishing platform designed for process research and product development. It integrates chemical mechanical polishing with closed-loop load control, a wide speed range, automated slurry delivery, and real-time signal monitoring. By combining polishing capability with an inline three-dimensional surface profiler, this system enables detailed investigation of surface topography, friction, and wear evolution during the polishing process, supporting accurate optimization of polishing parameters.
Application
The Chemical Mechanical Polisher is widely used in laboratory and pilot-scale environments for polishing process optimization and material behavior studies, including:
Semiconductor wafer polishing (Si, GaN and related substrates)
Optical component surface finishing
Substrate and thin material planarization
Aerospace material surface preparation
Research on friction, wear, and material removal mechanisms
Typical test objects include semiconductor wafers, optical substrates, bonded pads, and development samples with diameters from 0.5 inch to 4.25 inches.
Standards
The system is primarily intended for research and development applications. It supports experimental setups and evaluation methods commonly referenced in:
(1) Semiconductor CMP process research practices
(2) Optical surface finishing and planarization studies
(3) Tribology and wear mechanism investigation methods
Specific test standards depend on user-defined processes and research objectives.
Parameters
| Item | Description |
|---|---|
| Load Control | Closed-loop loading force control with high-precision force sensor |
| Torque Measurement | High-resolution online torque measurement |
| Wafer Holder | Self-leveling fixture with active rotation and horizontal oscillation |
| Sample Size Range | 0.5 inch to 4.25 inches |
| Platform | Fully automated XY platform with quick-change capability |
| Speed Control | Wide adjustable speed range via programmable control |
| Slurry Delivery | Automatic slurry delivery system |
| Inline Sensors | Torque, temperature, and acoustic emission |
| Surface Measurement | Integrated inline three-dimensional optical profiler |
Отправить запрос, связаться с поставщиком
Другие товары поставщика
 |
In-situ Gas Analysis System for Lithium Battery Thermal Runaway | Get a quote： Whats/App: +86 181 0160 0864 Web: gellowen.co.uk The In-situ Gas Analysis System for Lithium Battery Thermal Runaway is an advanced... |
 |
Safety Footwear Compression Puncture Tester | Get a quote： Whats/App: +86 181 0160 0864 Web: gellowen.co.uk TheSafety Footwear Compression Puncture Testeris designed to evaluate the compress... |
 |
Rapid screening Calorimeter | Get a quote： Whats/App: +86 181 0160 0864 Web: gellowen.co.uk The rapid - screening calorimeter is a professional calorimetric instrument for th... |
 |
Sponge foam collapsible hardness tester | Get a quote： Whats/App: +86 181 0160 0864 Web: gellowen.co.uk This machine is used to measure the indentation hardness of porous elastic materia... |
 |
Geosynthetics Horizontal Penetration Tester | Get a quote： Whats/App: +86 181 0160 0864 Web: gellowen.co.uk The geosynthetic material horizontal permeability tester simulates water flow cond... |
Похожие товары
 |
Высокоскоростная экструзионная линия для производства гофрированных труб с двойными стенками из ПЭВП с водяным охлаждением | Продавец: Shandong HUASU Plastic Technology Co.,Ltd. | Формы имеют структуру с двойным каналом потока и фильерную головку, обработанную азотированием и ... |
 |
PanEVAP & MVR system | Продавец: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | A multiple-effect evaporator is a device that efficiently uses steam heat to evaporate water. Wat... |
 |
PanGAP wide gap welded plate heat exchanger | Продавец: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | PanGAP wide gap welded plate heat exchangerconsists of a welded plate pack with different channel... |
 |
PanBloc welded plate heat exchanger | Продавец: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | PanBloc welded plate heat exchangeris compact and efficient, although fully welded, is totally ac... |
 |
PanBox welded plate heat exchanger | Продавец: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | PanBox welded plate heat exchangerconsists of a laser welded plate pack with optimized corrugated... |
