Tantalum rotatable sputtering targets
Product Name: tantalum tube, tantalum capillary tubeExecution standard: B521-98 ASTMBrand: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)Specifications: diameter 1.0-150mmThickness 0.2-5.0MMLength 200mm-6000mmchemical composition牌号mian compositionothers max%TaNbFeSiNiWMoTiNbOCHNTa1remind——0.0050.0050.0020.010.010.0020.040.020.010.00150.01Ta2remind——0.030.020.0050.040.030.0050.10.030.010.00150.01TaNb3remind＜3.50.030.030.0050.040.030.005——0.030.010.00150.01TaNb20remind17.0～23.00.030.030.0050.040.030.005——0.030.010.00150.01Ta2.5Wremind0.0050.0050.0023.00.010.0020.040.020.010.00150.01Ta10Wremind0.0050.0050.002110.010.0020.040.020.010.00150.01If users have special requirements, the two sides agreedTable 1. Outside diameter and wall thickness toleranceOD,inch(mm)OD Tolerance, inch(mm), +/- wall thickness tolerance, %, +/- <1 (25.4)0.004 (0.102) 10 1~1.5 (25.4~38.1)0.005 (0.127) 10 1.5~2 (38.1~50.8)0.006 (0.152) 10 2~2.5 (50.8~63.5)0.007 (0.178) 10 2.5~3.5 (63.5~88.9)0.008 (0.254) 10 Table two. Mechanical properties (annealed)GradeUltimate tensile strength,Pounds per inch (MPa) 2Minimum yield strength,Pounds per inch 2 (MPa)Elongation, min,%1 inch (25.4 mm) mark RO5200/RO5400 30000 (207)20000 (138) 25 RO525240000 (276) 28000 (193) 20 RO525570000 (481) 60000 (414) 15 RO524040000 (276) 28000 (193) 20
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