White Light Interferometer
The White Light Interferometer is widely used for non-contact surface topography and dimensional measurements across multiple industries and material types.
Typical application scenarios and tested products include:
Aerospace components: surface roughness and step height measurement
Automotive parts: coated surfaces and precision machined components
Biomedical materials: surface morphology of bio-materials and coatings
Optical and glass products: lenses, glass substrates, transparent materials
Semiconductor industry: thin films, wafers, and micro-structured surfaces
Polymer and coating materials: film thickness and surface texture analysis
Pharmaceutical products: coated tablets and functional surfaces
Display panels: surface flatness and micro-topography inspection
Standards
The White Light Interferometer supports surface measurement and analysis methods aligned with commonly adopted international standards, including but not limited to:
(1) ISO 25178 – Geometrical Product Specifications (GPS): Surface texture – Areal
(2) ISO 4287 – Surface texture: Profile method – Terms, definitions and parameters
(3) ISO 5436 – Measurement of surface roughness standards
(4) ISO 16610 – Filtration of surface texture data
Parameters
| Parameter | Specification |
|---|---|
| Measurement method | White Light Interferometry (WLI) |
| Vertical resolution | Sub-nanometer |
| Measurement mode | Non-contact optical measurement |
| Illumination source | Four-band LED (Red, Green, Blue, White) |
| Imaging capability | 2D and 3D surface topography |
| Stage type | Fully automatic high-precision stage |
| Stitching function | Automatic large-area image stitching |
| Microscope type | Fully automated optical microscope |
Features
Non-contact surface topography measurement with high vertical accuracy
Sub-nanometer vertical resolution for precise height and roughness analysis
White light interferometry combined with phase-shifting interferometry (PSI)
Four-band LED illumination to support multiple measurement modes
Fully automated optical microscope with easy operation
Automatic stage scanning and image stitching for large samples
Cost-effective design with high measurement accuracy
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