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White Light Interferometer

The White Light Interferometer is widely used for non-contact surface topography and dimensional measurements across multiple industries and material types.

Typical application scenarios and tested products include:

Aerospace components: surface roughness and step height measurement

Automotive parts: coated surfaces and precision machined components

Biomedical materials: surface morphology of bio-materials and coatings

Optical and glass products: lenses, glass substrates, transparent materials

Semiconductor industry: thin films, wafers, and micro-structured surfaces

Polymer and coating materials: film thickness and surface texture analysis

Pharmaceutical products: coated tablets and functional surfaces

Display panels: surface flatness and micro-topography inspection

Standards

The White Light Interferometer supports surface measurement and analysis methods aligned with commonly adopted international standards, including but not limited to:

(1) ISO 25178 – Geometrical Product Specifications (GPS): Surface texture – Areal

(2) ISO 4287 – Surface texture: Profile method – Terms, definitions and parameters

(3) ISO 5436 – Measurement of surface roughness standards

(4) ISO 16610 – Filtration of surface texture data

Parameters

ParameterSpecification
Measurement method White Light Interferometry (WLI)
Vertical resolution Sub-nanometer
Measurement mode Non-contact optical measurement
Illumination source Four-band LED (Red, Green, Blue, White)
Imaging capability 2D and 3D surface topography
Stage type Fully automatic high-precision stage
Stitching function Automatic large-area image stitching
Microscope type Fully automated optical microscope

Features

Non-contact surface topography measurement with high vertical accuracy

Sub-nanometer vertical resolution for precise height and roughness analysis

White light interferometry combined with phase-shifting interferometry (PSI)

Four-band LED illumination to support multiple measurement modes

Fully automated optical microscope with easy operation

Automatic stage scanning and image stitching for large samples

Cost-effective design with high measurement accuracy


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