Large-Area 3D Optical Surface Profilometer

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Whats/App: +86 181 0160 0864

Web: gellowen.co.uk

Large-Area 3D Optical Surface Profilometer is a high-performance three-dimensional optical metrology system designed for large-area surface topography measurement. It combines high-speed scanning, multiple imaging technologies, and ultra-high vertical resolution to deliver accurate and repeatable 3D surface data across a wide range of sample sizes and material types. By integrating six imaging and analysis methods on a single platform, this system enables nanoscale surface characterization while maintaining excellent efficiency and measurement flexibility.

Application

The Large-Area 3D Optical Surface Profilometer is suitable for surface morphology analysis and dimensional evaluation of various materials and components, including but not limited to:

Semiconductor wafers and microelectronic devices

Thin films and optical coatings

Precision mechanical components

Functional surfaces with large slopes or low reflectivity

Transparent or multilayer materials

Micro- and nano-structured surfaces

Typical test objects include wafers, devices, thin films, coated components, and precision assemblies requiring large-area, high-resolution surface measurement.

Standards

The system’s analysis capabilities and software design support surface metrology requirements defined in relevant international standards, including but not limited to:

ISO 25178 (Surface texture: Areal)

ISO 4287 / ISO 4288 (Surface roughness parameters and evaluation)

ISO 16610 (Filtration of surface texture)

ISO standards for optical surface measurement and reporting

Parameters

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