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kokusai D5CN65734-002

AboutKokusai Electric

Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System“AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”

★Single wafer Annealing system“TANDUO®”

★Dry Resist Strip System“Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

Recommend

AAI543-S00 S1 QLCCM24AANA5E00282046 SMP-E431-A6
AAP135-S00 S2 QLCCM24AANA5E00282046/06 SSN-BG89A010563
AAR181-S00 S2 QLSAMBAN T89120-E3087-H
ER5*B R15E02A186 IC695CMM002
EP3*A RD63F200 IC694MDL740
EH1*A RMS-TIG-TZ-C IC695ALG608-EA
IC698RMX016CA TSXP4720 IC694ALG392
IC695ETM001 TSXP47455 U-55T
HE693THM449 TSXP57153M ULTRAMAT237MB2331-0BP00-2CA0
IC670ALG630 TSXP67455TSX6740 W89070-U2321-A6
DS200TCPSG1APE UST21(R) DS3800NGDD1C1B
DS215TCQAG1BZZ01A DS3800NGDC1A1A IS200TDBSH2AIS200TDBSH2AAA



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