kokusai 5UOT109739
AboutKokusai Electric
Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.
Products &Systems
Batch Processing Systems
★High Quality & High Performance Thermal Processing System“TSURUGI-C²
★High-productivity Batch Processing System“AdvancedAce®-300”
★Batch High Temperature Anneal Processing System
★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”
Single Wafer Processing System
★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”
★Single wafer Annealing system“TANDUO®”
★Dry Resist Strip System“Lambda300”
Advanced Thermal Process Technology
Overview
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
Features
Excellent step coverage
Precise Film Property Control
Low Temperature Deposition
Good film thickness uniformity
Low Contamination
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| AFV10D S2 | 16267-1/4 | VF701 |
| AIP827-2 S1 | 16267-1-2 | AMM12 S3 |
| S9129FA | 16267-1-4 | AMM42 S4 |
| 16135-21-2 | 140AMM0900 | AMM42 S3 |
| 16147-51-2 | 140ARI03010 | 146659-069 |
| 16168-1-1 | 140AVI03000 | 15377-4FM |
| 353A4F1NNNTNNA4 | 140AVO02000 | 15738-119 |
| ADM52-2 S4 | 16413-1-3 | 140CHS11000 |
| AMM32 S3 | 3-424-2283A02 | 140CHS32000 |
| PW702 S1 | 353A4F1NNNNNNA4 | 140CPS11100 |
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