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kokusai 3RFA007089

AboutKokusai Electric

Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System“AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”

★Single wafer Annealing system“TANDUO®”

★Dry Resist Strip System“Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

Recommend

PW402 S2 ADV561-P00 S2 140CPS11420
AAT141-S00 S2 ADV151-P00 S2 140CPS12420
ADV161-P00 S2 ADV151-P00 S2 ATD5A-00 140CPS21400
140ACO02000 USP2I 16180-500 PSMBXNAN
140ACO13000 140ACI03000 16182-1-3
140AII33010 140ACI04000 16187-1-1
AAI543-H00 S1 140ACI05100SC 16249-51-4
AFV10D S2 16267-1/4 VF701
AIP827-2 S1 16267-1-2 AMM12 S3
S9129FA 16267-1-4 AMM42 S4
16135-21-2 140AMM0900 AMM42 S3
16147-51-2 140ARI03010 146659-069
16168-1-1 140AVI03000 15377-4FM
353A4F1NNNTNNA4 140AVO02000 15738-119
ADM52-2 S4 16413-1-3 140CHS11000
AMM32 S3 3-424-2283A02 140CHS32000
PW702 S1 353A4F1NNNNNNA4 140CPS11100



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