kokusai 3ROT162752
AboutKokusai Electric
Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.
Products &Systems
Batch Processing Systems
★High Quality & High Performance Thermal Processing System“TSURUGI-C²
★High-productivity Batch Processing System“AdvancedAce®-300”
★Batch High Temperature Anneal Processing System
★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”
Single Wafer Processing System
★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”
★Single wafer Annealing system“TANDUO®”
★Dry Resist Strip System“Lambda300”
Advanced Thermal Process Technology
Overview
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
Features
Excellent step coverage
Precise Film Property Control
Low Temperature Deposition
Good film thickness uniformity
Low Contamination
P0930DM Console, Display Surface, Plain
P0930DN Console Wedge Assembly
P0930DP Console Display Panel, Wedge, Plain
P0930DR Console End/Printer Table Assembly
P0930DT Arm, End Table To Wedge
P0930DU Console End Cap, Work Surface
P0930DW Console Bay, Work Surface
P0930DX Console Wedge, Work Surface
P0930DY Console End Table To Wedge Work Surface, w/Cutout
P0930DZ Tabletop, Attached To A Console
P0930EE Console Table, Rear Panel
P0930EF Console Bay, Strut, Work Surface Support, Left
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