kokusai CQ1500A
AboutKokusai Electric
Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.
Products &Systems
Batch Processing Systems
★High Quality & High Performance Thermal Processing System“TSURUGI-C²
★High-productivity Batch Processing System“AdvancedAce®-300”
★Batch High Temperature Anneal Processing System
★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”
Single Wafer Processing System
★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”
★Single wafer Annealing system“TANDUO®”
★Dry Resist Strip System“Lambda300”
Advanced Thermal Process Technology
Overview
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
Features
Excellent step coverage
Precise Film Property Control
Low Temperature Deposition
Good film thickness uniformity
Low Contamination
P0930EG Console Bay, Cover, Upper Rear
P0930EK Console Bay, Brace, Arms
P0930EU Console Wedge, Cover, Rear
P0930EV Console Wedge, Weldment
P0930EY Trim Panel Molding, Left
P0930FC Bracket, Wire Way, Left
P0930FD Bracket, Wire Way, Right
P0930FE Wire Way, Bay To End Table, Left
P0930FF Wire Way, Bay To End Table, Right
P0930FG Bracket, Bay To Bay
P0930FH Display Surface, 1 Annunciator
P0930FK Trim Panel Molding, Right
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