CF4 Gas 99.999% for Etching & Cleaning
Tetrafluoromethane is a colorless, non-flammable gas. As a compressed gas at room temperature, CF4 is one of the most stable organic compounds. At 900℃, CF4 does not react with Cu, Ni, W, Mo, and only slowly decompose at carbon arc temperature. When burned with combustible gases, they decompose to produce toxic fluoride. In case of high heat, the pressure inside the container increases, there is a risk of cracking and explosion.
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