High-precision 3D surface profilometry system
Whats/App: +86 156 1874 6768
Web: standard-groups.com
Application
The Large-Area 3D Optical Surface Profilometer is suitable for surface morphology analysis and dimensional evaluation of various materials and components, including but not limited to:
Semiconductor wafers and microelectronic devices
Thin films and optical coatings
Precision mechanical components
Functional surfaces with large slopes or low reflectivity
Transparent or multilayer materials
Micro- and nano-structured surfaces
Typical test objects include wafers, devices, thin films, coated components, and precision assemblies requiring large-area, high-resolution surface measurement.
Standards
The system’s analysis capabilities and software design support surface metrology requirements defined in relevant international standards, including but not limited to:
ISO 25178 (Surface texture: Areal)
ISO 4287 / ISO 4288 (Surface roughness parameters and evaluation)
ISO 16610 (Filtration of surface texture)
ISO standards for optical surface measurement and reporting
Parameters
| Parameter | Specification |
|---|---|
| Imaging speed | High-speed camera up to 200 FPS |
| Z-axis resolution | Sub-nanometer resolution, independent of objective magnification or scan range |
| Imaging technologies | White light interferometry, confocal, spectral film thickness, bright field, dark field, zoom imaging, AFM |
| XY stage | Modular precision XY stage, customizable up to 300 × 300 mm |
| Sample compatibility | Wafers, devices, thin films, components, large-area samples |
| Software | ISO-compliant analysis software with automated measurement and reporting |
Accessories
Precision modular XY stage (up to 300 × 300 mm)
High-speed imaging camera
Confocal scanning module
White light interferometry module
Thin film thickness measurement module
AFM measurement module
Send product request
Other supplier products
 |
Gas Oxidizing Property Tester | Whats/App: +86 156 1874 6768 Web: standard-groups.com Product Description Conforms to ISO 10156-2010 “Gases and Gas Mixtures Selection of C... |
 |
Diaper Anti-Side Leakage Performance Tester | Whats/App: +86 156 1874 6768 Web: standard-groups.com The Diaper Anti-Side Leakage Performance Tester is designed to accurately measure the liqui... |
 |
Mechanical Scratch Tester | Whats/App: +86 156 1874 6768 Web: standard-groups.com Application Primary test purposes Coating scratch resistance evaluation Coating hardness... |
 |
4000 Hours Test Kit For Xenon light WeatherOmeeter | Whats/App: +86 156 1874 6768 Web: standard-groups.com Introduction 4 thousand hours xenon lamp tester spare package, allows your device has a lon... |
 |
Photovoltaic module damp heat test chamber | Whats/App: +86 156 1874 6768 Web: standard-groups.com Standard IEC 61215: Terrestrial Photovoltaic (PV) Modules – Design Qualification and... |
Same products
 |
HDPE High Speed Water Cooled Double Wall Corrugated Pipe Extrusion Line | Seller: Shandong HUASU Plastic Technology Co.,Ltd. | The molds adopt the double flow channel structure and nitriding polishing processed die head. Thi... |
 |
PanEVAP & MVR system | Seller: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | A multiple-effect evaporator is a device that efficiently uses steam heat to evaporate water. Wat... |
 |
PanGAP wide gap welded plate heat exchanger | Seller: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | PanGAP wide gap welded plate heat exchangerconsists of a welded plate pack with different channel... |
 |
PanBloc welded plate heat exchanger | Seller: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | PanBloc welded plate heat exchangeris compact and efficient, although fully welded, is totally ac... |
 |
PanBox welded plate heat exchanger | Seller: Yangzhou Panstar Heat Exchanger Equipment Co., Ltd | PanBox welded plate heat exchangerconsists of a laser welded plate pack with optimized corrugated... |
