Lobster185Z340D-T2X0-C Wafer Robot
Lobster series 185Z340D-T2X0-C wafer handling robot is a two-armed wafer transfer robotwith a rate payload of 2kg. Equipped with a high-tech wafer transfer system, it has extremely high accuracy, flexibility and safety.
Features of Lobster185Z340D-T2X0-C wafer transfer system
Two-armed; payload is 2kg;
4-degrees-of-freedom;
Repositioning accuracy reaches ±0.1mm;
Cleanliness reaches Class100.
ROBOTPHOENIX, as an excellent robot manufacturing companies, offers a wide range of delta robotfor you to choose from.
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