Refractory Reaction Bonded Silicon Carbide (RBSIC or SiSiC) Cantilever Paddles
The Refractory Reaction Bonded Silicon Carbide (RBSIC or SiSiC) Cantilever Paddles display stable performance, with no deformation under high temperature. They are suitalbe for the automatic loading and transfering system for robots. The application of cantilever paddles in LPCVD can greatly extend the maintainance and cleaning cycle.
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