Piezo Micro/Nano-positioning Stages From CoreMorrow with Millimeter Travel and Nanometer Resolution
Characteristics
■Alternativeforstandardmicrometerdrives:13mm/25umtravel
■Piezoelectrictravelto25um
■Sub-nanometerresolution(<1nm)
■Dynamicoperation
p83 ismicrometerdriveswithintegratedhigh-resolutionpiezolineardrives.Itcanbeoperatedmanually.13mm/25mmtravel,andresolutionupto10um.Bycontrollingthepiezovoltage,themicrometertipisautomaticallymovedinandoutrelativetothemanuallysetposition.Travelofthepiezoactuatorsisupto25um,resolution<1nm.Itcanthereforebeusedasaremotelycontrolledfinepositioningelement.
Workprinciple
AsophisticatedwireEDM(electricdischargemachining)flexuremotionamplifierdoublesthedisplacementofapiezolinearactuator.Italsoservesasalinearguidetothemicrometerdrive,whichismovedbackandforthwhenthepiezodrivevoltageischanged.Thisdesigniscompactandmechanicallystable.
P83piezoelectricmicrometerdrivecanbemountedlikeamicrometerdrivebyclampingaroundthesleeve.
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