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Piezo Micro/Nano-positioning Stages From CoreMorrow with Millimeter Travel and Nanometer Resolution

Characteristics

■Alternativeforstandardmicrometerdrives:13mm/25umtravel

■Piezoelectrictravelto25um

■Sub-nanometerresolution(<1nm)

■Dynamicoperation

p83 ismicrometerdriveswithintegratedhigh-resolutionpiezolineardrives.Itcanbeoperatedmanually.13mm/25mmtravel,andresolutionupto10um.Bycontrollingthepiezovoltage,themicrometertipisautomaticallymovedinandoutrelativetothemanuallysetposition.Travelofthepiezoactuatorsisupto25um,resolution<1nm.Itcanthereforebeusedasaremotelycontrolledfinepositioningelement.

Workprinciple

AsophisticatedwireEDM(electricdischargemachining)flexuremotionamplifierdoublesthedisplacementofapiezolinearactuator.Italsoservesasalinearguidetothemicrometerdrive,whichismovedbackandforthwhenthepiezodrivevoltageischanged.Thisdesigniscompactandmechanicallystable.

P83piezoelectricmicrometerdrivecanbemountedlikeamicrometerdrivebyclampingaroundthesleeve.



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