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Advanced 3D Optical Surface Profilometer

The Advanced 3D Optical Surface Profilometer is suitable for comprehensive surface characterization of materials with different optical properties, surface roughness levels, and geometries.

Typical application scenarios and tested products include:

Aerospace components: functional coatings, precision parts, surface defect inspection

Automotive materials: coated parts, metal surfaces, wear-related surface analysis

Biomedical materials: surface morphology of bio-compatible materials and coatings

Optical and glass products: lenses, glass panels, transparent and reflective surfaces

Semiconductor and display industry: thin films, substrates, protective coatings

Polymer and coating materials: surface roughness, defects, and thickness analysis

Pharmaceutical products: coated tablets and functional surfaces

Standards

The system is suitable for surface topography measurement and analysis in accordance with widely used international standards, including but not limited to:

(1) ISO 25178 – Geometrical Product Specifications (GPS): Surface texture – Areal

(2) ISO 4287 – Surface texture: Profile method – Terms, definitions and parameters

(3) ISO 16610 – Filtration of surface texture data

(4) ISO 5436 – Measurement of surface roughness standards

Parameters

ParameterSpecification
Camera speed Up to 200 FPS
Vertical (Z) resolution Sub-nanometer, independent of objective magnification or scan range
Imaging modes Confocal, White Light Interferometry, Bright Field, Dark Field, Zoom
XY stage Fully automatic motorized XY stage
Sample alignment Adjustable tilt stage
Scanning capability Large-area scanning with automatic stitching

Features

Multi-mode optical measurement integrated on a single platform

High-speed imaging enabled by dedicated high-speed cameras

Sub-nanometer vertical resolution for precise height measurement

Open system architecture for flexible sample handling

Automatic XY stage and tilt adjustment for accurate positioning

Support for large-area scanning and automatic image stitching

High image quality achieved through optimized optical paths


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