Advanced 3D Optical Surface Profilometer
The Advanced 3D Optical Surface Profilometer is suitable for comprehensive surface characterization of materials with different optical properties, surface roughness levels, and geometries.
Typical application scenarios and tested products include:
Aerospace components: functional coatings, precision parts, surface defect inspection
Automotive materials: coated parts, metal surfaces, wear-related surface analysis
Biomedical materials: surface morphology of bio-compatible materials and coatings
Optical and glass products: lenses, glass panels, transparent and reflective surfaces
Semiconductor and display industry: thin films, substrates, protective coatings
Polymer and coating materials: surface roughness, defects, and thickness analysis
Pharmaceutical products: coated tablets and functional surfaces
Standards
The system is suitable for surface topography measurement and analysis in accordance with widely used international standards, including but not limited to:
(1) ISO 25178 – Geometrical Product Specifications (GPS): Surface texture – Areal
(2) ISO 4287 – Surface texture: Profile method – Terms, definitions and parameters
(3) ISO 16610 – Filtration of surface texture data
(4) ISO 5436 – Measurement of surface roughness standards
Parameters
| Parameter | Specification |
|---|---|
| Camera speed | Up to 200 FPS |
| Vertical (Z) resolution | Sub-nanometer, independent of objective magnification or scan range |
| Imaging modes | Confocal, White Light Interferometry, Bright Field, Dark Field, Zoom |
| XY stage | Fully automatic motorized XY stage |
| Sample alignment | Adjustable tilt stage |
| Scanning capability | Large-area scanning with automatic stitching |
Features
Multi-mode optical measurement integrated on a single platform
High-speed imaging enabled by dedicated high-speed cameras
Sub-nanometer vertical resolution for precise height measurement
Open system architecture for flexible sample handling
Automatic XY stage and tilt adjustment for accurate positioning
Support for large-area scanning and automatic image stitching
High image quality achieved through optimized optical paths
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