White Light Interferometer for Surface Topography Measurement

Whats/App: +86 156 1874 6768

Web: standard-groups.com

Standards

The White Light Interferometer supports surface measurement and analysis methods aligned with commonly adopted international standards, including but not limited to:

(1) ISO 25178 – Geometrical Product Specifications (GPS): Surface texture – Areal

(2) ISO 4287 – Surface texture: Profile method – Terms, definitions and parameters

(3) ISO 5436 – Measurement of surface roughness standards

(4) ISO 16610 – Filtration of surface texture data

Parameters

Parameter	Specification
Measurement method	White Light Interferometry (WLI)
Vertical resolution	Sub-nanometer
Measurement mode	Non-contact optical measurement
Illumination source	Four-band LED (Red, Green, Blue, White)
Imaging capability	2D and 3D surface topography
Stage type	Fully automatic high-precision stage
Stitching function	Automatic large-area image stitching
Microscope type	Fully automated optical microscope

Features

Non-contact surface topography measurement with high vertical accuracy

Sub-nanometer vertical resolution for precise height and roughness analysis

White light interferometry combined with phase-shifting interferometry (PSI)

Four-band LED illumination to support multiple measurement modes

Fully automated optical microscope with easy operation

Automatic stage scanning and image stitching for large samples

Cost-effective design with high measurement accuracy

Accessories

(1) Fully automatic precision XY stage

(2) Four-band LED illumination module (Red, Green, Blue, White)

(3) Zoom imaging optics

(4) Integrated phase-shifting interferometry module

(5) Surface analysis and reporting software

Test Procedures

Place the sample on the precision stage and secure it properly.

Select the appropriate measurement mode, such as white light interferometry or phase-shifting interferometry.

Adjust the zoom optics and focus position according to sample characteristics.

Initiate automatic scanning to acquire surface data without physical contact.

Enable automatic stitching if large-area surface measurement is required.

Analyze roughness, step height, film thickness, and three-dimensional topography using the analysis software.

Maintenance Information

Keep optical components clean to ensure stable measurement accuracy.

Periodically check the calibration status of the precision stage.

Ensure the LED illumination system operates correctly across all wavelength bands.

Store the instrument in a clean, vibration-free environment when not in use.

Perform routine system inspections to maintain long-term measurement reliability.

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