White Light Interferometer for Surface Topography Measurement
Whats/App: +86 156 1874 6768
Web: standard-groups.com
Standards
The White Light Interferometer supports surface measurement and analysis methods aligned with commonly adopted international standards, including but not limited to:
(1) ISO 25178 – Geometrical Product Specifications (GPS): Surface texture – Areal
(2) ISO 4287 – Surface texture: Profile method – Terms, definitions and parameters
(3) ISO 5436 – Measurement of surface roughness standards
(4) ISO 16610 – Filtration of surface texture data
Parameters
| Parameter | Specification |
|---|---|
| Measurement method | White Light Interferometry (WLI) |
| Vertical resolution | Sub-nanometer |
| Measurement mode | Non-contact optical measurement |
| Illumination source | Four-band LED (Red, Green, Blue, White) |
| Imaging capability | 2D and 3D surface topography |
| Stage type | Fully automatic high-precision stage |
| Stitching function | Automatic large-area image stitching |
| Microscope type | Fully automated optical microscope |
Features
Non-contact surface topography measurement with high vertical accuracy
Sub-nanometer vertical resolution for precise height and roughness analysis
White light interferometry combined with phase-shifting interferometry (PSI)
Four-band LED illumination to support multiple measurement modes
Fully automated optical microscope with easy operation
Automatic stage scanning and image stitching for large samples
Cost-effective design with high measurement accuracy
Accessories
(1) Fully automatic precision XY stage
(2) Four-band LED illumination module (Red, Green, Blue, White)
(3) Zoom imaging optics
(4) Integrated phase-shifting interferometry module
(5) Surface analysis and reporting software
Test Procedures
Place the sample on the precision stage and secure it properly.
Select the appropriate measurement mode, such as white light interferometry or phase-shifting interferometry.
Adjust the zoom optics and focus position according to sample characteristics.
Initiate automatic scanning to acquire surface data without physical contact.
Enable automatic stitching if large-area surface measurement is required.
Analyze roughness, step height, film thickness, and three-dimensional topography using the analysis software.
Maintenance Information
Keep optical components clean to ensure stable measurement accuracy.
Periodically check the calibration status of the precision stage.
Ensure the LED illumination system operates correctly across all wavelength bands.
Store the instrument in a clean, vibration-free environment when not in use.
Perform routine system inspections to maintain long-term measurement reliability.
Send product request
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