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kokusai 3MAA007069

AboutKokusai Electric

Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System“AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”

★Single wafer Annealing system“TANDUO®”

★Dry Resist Strip System“Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

Recommend

140CPS22400 353A4FNCNB4 140CPU11302
140CPS51100 353D4F1NNETNNA4 140CPU11303
140CPS52400 383VA21N1F 140CPU21304
405-15ABM 140CPU65260 39ACM14CAN
405-4DAC-1 140CPU67060 39PSMNAN
405-4DAC-2 140CPU67160 39PSR4ANDN16114-200/01
140CPU31110 39RTMCAN
140CPU42402 39SDM024DCCBN 140CPU43412
140CPU4321A 39VIMCBN 140CPU43412A
39VIMNBN 39VIMCCN 140CPU43412U
3RX9306-1AA00 140CPU65150 405-8ADC-1
3TE4602-5A 140CPU65160 500-2151



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