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kokusai 5UOT125891

About Kokusai Electric

Kokusai Electric is a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers. Kokusai Electric produces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers. Kokusai Electric enables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System “AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers “VERTRON® Revolution”

 

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System “MARORA®”

★Single wafer Annealing system “TANDUO®”

★Dry Resist Strip System “Lambda300”

 

Advanced Thermal Process Technology

Overview

 

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®). 
The BCD® technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

 

P0930DM Console, Display Surface, Plain

P0930DN Console Wedge Assembly

P0930DP Console Display Panel, Wedge, Plain

P0930DR Console End/Printer Table Assembly

P0930DT Arm, End Table To Wedge

P0930DU Console End Cap, Work Surface

P0930DW Console Bay, Work Surface

P0930DX Console Wedge, Work Surface

P0930DY Console End Table To Wedge Work Surface, w/Cutout

P0930DZ Tabletop, Attached To A Console

P0930EE Console Table, Rear Panel

P0930EF Console Bay, Strut, Work Surface Support, Left



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