kokusai XGTA-X307
AboutKokusai Electric
Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.
Products &Systems
Batch Processing Systems
★High Quality & High Performance Thermal Processing System“TSURUGI-C²
★High-productivity Batch Processing System“AdvancedAce®-300”
★Batch High Temperature Anneal Processing System
★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”
Single Wafer Processing System
★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”
★Single wafer Annealing system“TANDUO®”
★Dry Resist Strip System“Lambda300”
Advanced Thermal Process Technology
Overview
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
Features
Excellent step coverage
Precise Film Property Control
Low Temperature Deposition
Good film thickness uniformity
Low Contamination
P0930FL Keyboard, Cross Brace
P0930FQ Work Surface Tie Kit
P0930FR Spline
P0930FW 50 Ft Video Cable
P0930FX 15 Ft Video Cable
P0930FY 50 Ft Mouse/Keyboard Cable, NT
P0930FZ 15 Ft Mouse/Keyboard Cable, NT
P0930HL SUN 15 Ft Keyboard Cable
P0930HM SUN 50 Ft Keyboard Cable
P0930HN Console Bay, Strut, Work Surface, Support, Right
P0930HP Bracket, Mounting GCIO
P0930HQ Bracket, Arm Alignment
P0930HT Center Table, Work Surface, Wedge To Bay
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