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kokusai XGTA-X307

AboutKokusai Electric

Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System“AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”

★Single wafer Annealing system“TANDUO®”

★Dry Resist Strip System“Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

P0930FL Keyboard, Cross Brace

P0930FQ Work Surface Tie Kit

P0930FR Spline

P0930FW 50 Ft Video Cable

P0930FX 15 Ft Video Cable

P0930FY 50 Ft Mouse/Keyboard Cable, NT

P0930FZ 15 Ft Mouse/Keyboard Cable, NT

P0930HL SUN 15 Ft Keyboard Cable

P0930HM SUN 50 Ft Keyboard Cable

P0930HN Console Bay, Strut, Work Surface, Support, Right

P0930HP Bracket, Mounting GCIO

P0930HQ Bracket, Arm Alignment

P0930HT Center Table, Work Surface, Wedge To Bay



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至: Cambia Automation Limited
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