kokusai CX00BA/O
AboutKokusai Electric
Kokusai Electricis a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers.Kokusai Electricproduces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers.Kokusai Electricenables the increasingly high functionality and high performance of semiconductors.
Products &Systems
Batch Processing Systems
★High Quality & High Performance Thermal Processing System“TSURUGI-C²
★High-productivity Batch Processing System“AdvancedAce®-300”
★Batch High Temperature Anneal Processing System
★Batch Thermal Process System for 200mm Wafers“VERTRON®Revolution”
Single Wafer Processing System
★Single Wafer Plasma Nitridation / Oxidation System“MARORA®”
★Single wafer Annealing system“TANDUO®”
★Dry Resist Strip System“Lambda300”
Advanced Thermal Process Technology
Overview
KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®).
The BCD®technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.
Features
Excellent step coverage
Precise Film Property Control
Low Temperature Deposition
Good film thickness uniformity
Low Contamination
P0930HV Center Table, Work Surface, Wedge To Bay
P0930HX Audio Cable, 15 Ft
P0930HY Audio Cable, 50 Ft
P0931GE Terminal Block Rail
P0931JD FCM100E Baseplate Mounting Kit for Plastic Encl.
P0931KF Power Supply Redundancy Module
P0931KJ Compression Term Assy FBM243/246, PlyA
P0931NC Power Supply Output Cable – 2438 mm (96 in)
P0931ND Power Supply Output Cable – 2743 mm (108 in)
P0931NE Power Supply Output Cable – 3048 mm (120 in)
P0931NF Power Supply Output Cable – 3353 mm (132 in)
P0931NG Power Supply Output Cable – 3658 mm (144 in)
P0931QR Alarm Contact Terminal Block Rail
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