Nitrogen Trifluoride (NF₃)

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Product Details

Product Name

Electronic Industry Grade Nitrogen Trifluoride

Nitrogen Trifluoride (NF₃)

Purity

Electronic Grade: ≥99.99%

High-Purity: ≥99.996%

Impurity Content (ppm)

Impurity	Electronic Grade	High-Purity
Oxygen + Argon (O₂+Ar)	≤3.0	≤3.0
Nitrogen (N₂)	≤5.0	≤5.0
Carbon Tetrafluoride (CF₄)	≤40	≤20
Carbon Monoxide (CO)	≤1.0	≤0.5
Carbon Dioxide (CO₂)	≤1.0	≤0.5
Dinitrogen Monoxide (N₂O)	≤1.0	≤1.0
Sulfur Hexafluoride (SF₆)	≤1.0	≤1.0
Moisture (H₂O)	≤1.0	≤1.0
Acidity (as HF)	≤1.0	≤1.0

Packaging

Available in 43.3L DOT cylinders, 440L Y-cylinders, and bulk tank trucks.

Applications

Nitrogen trifluoride is an ideal etching agent used extensively in microelectronics.

Safety Information

CAS Number: 7783-54-2.

Physical and Chemical Properties: Colorless gas with a musty odor. Insoluble in water. Melting point (℃): -208.5; Boiling point (℃): -129; Relative density (water=1): 1.89 (at boiling point, liquid); Relative density (air=1): No data; Saturation vapor pressure (kPa): No data; Flash point (℃): Not applicable; Combustion heat (kJ/mol): Not applicable; Critical temperature (℃): No data; Critical pressure (MPa): No data; Upper and Lower Explosion Limits (v%): Not applicable; Ignition temperature (℃): Not applicable.

Combustion and Explosion Hazards: Oxidizer, toxic. Strong oxidizing agent. Can burn or explode when heated or in contact with flames, electrical sparks, or organic materials. Reacts violently with flammable substances (such as benzene) and combustible materials (such as sugar, cellulose, etc.), potentially causing combustion. Strong reactions with reducing agents can cause combustion and explosion.

Firefighting Methods: Firefighters must wear full protective clothing and fight the fire from the upwind direction. Cut off the gas supply. Spray water to cool the container, and if possible, remove the container from the fire area to an open space. Fire extinguishing agents: water spray, foam.

Health Hazards: No occupational poisoning cases have been reported.

First Aid Measures: Inhalation: Quickly move to a fresh air area. Keep the airway clear. If breathing is difficult, administer oxygen. If breathing stops, perform artificial respiration immediately. If breathing and heartbeat stop, perform artificial respiration and external chest compressions immediately.

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