Electronic grade sulfuric acid
Product standards
| Standard specification for ultraclean and high-purity electronic chemicals |
| EL level |
UP level |
UP-S level |
UP-SS level |
| Processing Technology of Small and Medium Scale Integrated Circuits and Electronic Components |
Manufacturing process of integrated circuit and TFT-LCD above 0.8 μ m |
0.2-0.8 micron IC processing technology |
0.18-0.09 micron line width integrated circuit processing technology |
| Control 1 micron particle size |
Filter through 0.2 μ m aperture filter to control 0.5 μ m particles |
Filtered by 0.05 μ m aperture filter to control 0.2 μ m particles |
Filtered by 0.05 μ m aperture filter to control 0.2 μ m particles |
| Metal impurity content is less than 100ppb |
Metal impurity content is less than 10ppb |
Metal impurity content is less than 1 ppb |
Impurity content of single metal ion ≤ 0.1ppb |
| Meet SEMI C1 C2 standard |
Filling in 100 level purified environment, meeting SEMIC7 standard |
Filling in 100 level purified environment, meeting SEMIC8 standard |
Filling in 100 level purified environment, meeting SEMIGrade4 standard |
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Electronic grade sulfuric acid |
Molecular formula
Purity level
UP-SS
UP-S
UP
EL
H₂O₂
√
√
√
√
HCI
√
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