Large-Area 3D Optical Surface Profilometer
Large-Area 3D Optical Surface Profilometer is a high-performance three-dimensional optical metrology system designed for large-area surface topography measurement. It combines high-speed scanning, multiple imaging technologies, and ultra-high vertical resolution to deliver accurate and repeatable 3D surface data across a wide range of sample sizes and material types. By integrating six imaging and analysis methods on a single platform, this system enables nanoscale surface characterization while maintaining excellent efficiency and measurement flexibility.
Application
The Large-Area 3D Optical Surface Profilometer is suitable for surface morphology analysis and dimensional evaluation of various materials and components, including but not limited to:
Semiconductor wafers and microelectronic devices
Thin films and optical coatings
Precision mechanical components
Functional surfaces with large slopes or low reflectivity
Transparent or multilayer materials
Micro- and nano-structured surfaces
Typical test objects include wafers, devices, thin films, coated components, and precision assemblies requiring large-area, high-resolution surface measurement.
Standards
The system’s analysis capabilities and software design support surface metrology requirements defined in relevant international standards, including but not limited to:
ISO 25178 (Surface texture: Areal)
ISO 4287 / ISO 4288 (Surface roughness parameters and evaluation)
ISO 16610 (Filtration of surface texture)
ISO standards for optical surface measurement and reporting
Parameters
| Parameter | Specification |
|---|---|
| Imaging speed | High-speed camera up to 200 FPS |
| Z-axis resolution | Sub-nanometer resolution, independent of objective magnification or scan range |
| Imaging technologies | White light interferometry, confocal, spectral film thickness, bright field, dark field, zoom imaging, AFM |
| XY stage | Modular precision XY stage, customizable up to 300 × 300 mm |
| Sample compatibility | Wafers, devices, thin films, components, large-area samples |
| Software | ISO-compliant analysis software with automated measurement and reporting |
Features
Six-in-one integrated imaging and analysis platform
High-speed camera enabling rapid surface acquisition
Sub-nanometer vertical resolution for precise height measurement
Modular and scalable platform for large-area samples
High-resolution spinning disk confocal scanning for fast area imaging
Physical suppression of scattered light to improve image contrast and accuracy
Advanced software for automated analysis and standardized report generation
在线联系供应商
Other supplier products
 |
Safety Helmet High Temperature Pre-Treatment Chamber | The safety helmet high-temperature pre-treatment chamber is manufactured according to the GB/T2812-2019 standard for safety helmets and is primaril... |
 |
Bag fastener magnetic buckle testing machine | Product Introduction: This machine is mainly used to test the durability of the finished magnetic buckle under the action of tension Implementati... |
 |
Particle Abrasion meter | The Q-4D particle wear tester is specially designed as a standard instrument based on the national standard "Method for Determination of Wear Rate ... |
 |
Spinal Pedicle Screw-Rod System Compressive Fatigue Testing Machine | Standard YY/T 0857-2011 (China): Specifies compression fatigue testing protocols for spinal pedicle screw-rod systems, including load ratios, freq... |
 |
Xenon Arc Tester | Features and Benefits 1. A variety of filters are available. For example, daylight filters are used to simulate sunny days, and UV cut-off filters... |
Same products
 |
Common Rail Injector Valve Set F00RJ00339 | 卖方: Pioneer Diesel Parts | Pioneer Diesel Parts Whats/App: +86 152 6025 8100 Web: pioneerdieselparts.com The Common Rail ... |
 |
Fuel Injection Pump for Yanmar Wb93r Wb97r Wb97s Wb98a | 卖方: Pioneer Diesel Parts | Pioneer Diesel Parts Whats/App: +86 152 6025 8100 Web: pioneerdieselparts.com The Fuel Injecti... |
 |
VE Injection Pump VE3/9F1500L376AG | 卖方: Pioneer Diesel Parts | Pioneer Diesel Parts Whats/App: +86 152 6025 8100 Web: pioneerdieselparts.com The VE Injection... |
 |
Automotive seat durability and strength testing machine | 卖方: Standard International Group (HK) Limited | The Automotive Seat Three-Station Headrest and Backrest Static Strength Testing Machine is design... |
 |
Racing Seatback Headrest Restraint Device, Front and Rear Impact Testing Machine | 卖方: Standard International Group (HK) Limited | The Racing Seat Headrest Restraint and Front-Rear Impact Testing Machine is designed to evaluate ... |
