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0.5mm large travel range linear motion piezo nanometer positioner stage piezo amplified actuators piezo actuator

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500R7-1.jpg

500R7-2.jpg

500R7-3.jpg

2

Models

Max/stroke

[μm]±15%*

Blocking force

[N]

Stiffness

[N/μm]±20%

El. capacitance

[μF]±20%

Unloaded resonant

frequency [Hz]±20%

500R7

560/400

100

0.25

5.4

170

*Nominal Stroke corresponding drive voltage 0-150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

500R7-4.jpg

2

E01.C1 Piezo Controller

1channel

Open loop
Ave.current: 291mA

E63.C Piezo Controller

1channel

Open loop
Bandwidth:700Hz(-3dB)

E53 Piezo Controller

1channel

Open/closed loop
Ave.current: 60mA

2

VS9 Piezo Actuator

19μm travel range

200N blocking force

40kHz resonant frequency

P18.jpg

P18 Piezo Scanner

375um travel range

1~3 axes
Aperature:Ø35mm

P83Piezo Micrometers

25um+3mm travel range

Piezo resolution to 0.5nm
1~3 axes

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0.5mm large travel range linear motion piezo nanometer positioner stage piezo amplified actuators piezo actuator
0.5mm large travel range linear motion piezo nanometer positioner stage piezo amplified actuators piezo actuator Models Max/stroke [μm]±15%* Blocking force [N] Stiffness [N/μm]±20% El. capacitance [μF]±20% ...
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