.

0.5mm large travel range linear motion piezo nanometer positioner stage piezo amplified actuators piezo actuator

1.png

500R7-1.jpg

500R7-2.jpg

500R7-3.jpg

2

Models

Max/stroke

[μm]±15%*

Blocking force

[N]

Stiffness

[N/μm]±20%

El. capacitance

[μF]±20%

Unloaded resonant

frequency [Hz]±20%

500R7

560/400

100

0.25

5.4

170

*Nominal Stroke corresponding drive voltage 0-150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

500R7-4.jpg

2

E01.C1 Piezo Controller

1channel

Open loop
Ave.current: 291mA

E63.C Piezo Controller

1channel

Open loop
Bandwidth:700Hz(-3dB)

E53 Piezo Controller

1channel

Open/closed loop
Ave.current: 60mA

2

VS9 Piezo Actuator

19μm travel range

200N blocking force

40kHz resonant frequency

P18.jpg

P18 Piezo Scanner

375um travel range

1~3 axes
Aperature:Ø35mm

P83Piezo Micrometers

25um+3mm travel range

Piezo resolution to 0.5nm
1~3 axes

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