.

Linear piezo nanopositioning stages scanners for fluorescence microscope quick step time XYZ stage

P121.jpg

Linear piezo nanopositioning stages scanners for fluorescence microscope quick step time XYZ stage

·XYZ stage

·fluorescence microscope quick step time

·Scanning microscopy

P66-4

Models

S-Closed loop

K-Open loop

P12.X100S

P12.X100K

P12.Z100S

P12.Z100K

P12.Z200S

P12.Z200K

P12.Z300S

P12.Z300K

P12.XY100S

P12.XY100K

P12.XYZ100S

P12.XYZ100K

Units

Active axes

X

Z

Z

Z

X,Y

X,Y,Z

Travel range@120V

80

80

160

240

80

80

μm±20%

Travel range@150V

100

100

200

300

100

100

μm±20%

Sensor

SGS/-

Aperture

Ø25/Ø35

mm

Closed/open loop resolution

7/4

11/5

7/4

nm

Closed-loop linearity

0.05/-

0.05/-

0.1/-

0.15/-

0.1/-

0.1/-

%F.S

Repeatability

0.02/-

0.02/-

0.05/-

0.1/-

0.05/-

0.05/-

%F.S

Pitch/Yaw/Roll

<10

<10

<15

<15

<10

<15

μrad

Unloaded resonant frequency

230

220

150

100

X180/Y230

X230/Y180/Z150

Hz±20%

Closed/open-loop unloaded Step time

10/0.8

10/0.8

15/1.6

30/2.4

15/0.8

30/0.8

ms±20%

Unloaded operating frequency

10% Travel

100

100

50

30

100

50

Hz±20%

100% Travel

9

10

5

3

9

5

Load capacity

0.8

0.8

0.5

0.4

0.7

0.6

kg

Capacitance

1.8

1.8

3.6

5.4

1.8/axis

1.8/axis

μF±20%

Material

Steet, Aluminum

Mass

140

140

200

260

200

260

g±5%

P122.jpg
P123.jpg

P66-6.jpg

E00.D3 Piezo Controller

3 channels

Open/closed loop
Ave.current: 58mA

E70 Piezo Controller

3 channels

Closedloop
Ave.current: 70mA

E53 Piezo Controller

1channel

Open/closed loop
Ave.current: 60mA

.jpg

10×10/20 Piezo Stack

28μm travel range

7000N blocking force

50kHz resonant frequency

P32 FSM System

Theta X,theta Y, Z motion

Tilt angle up to 6mrad
Travel in Z: 37.5um

P79 Piezo Scanner

187.5μm travel range

Load to 2kg

Aperture: 128.5x86.5mm

FAQ

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