Linear piezo nanopositioning stages scanners for fluorescence microscope quick step time XYZ stage

Models

S-Closed loop

K-Open loop

P12.X100S

P12.X100K

P12.Z100S

P12.Z100K

P12.Z200S

P12.Z200K

P12.Z300S

P12.Z300K

P12.XY100S

P12.XY100K

P12.XYZ100S

P12.XYZ100K

Units

Active axes

X

Z

Z

Z

X,Y

X,Y,Z

Travel range@120V

80

80

160

240

80

80

μm±20%

Travel range@150V

100

100

200

300

100

100

μm±20%

Sensor

SGS/-

Aperture

Ø25/Ø35

mm

Closed/open loop resolution

7/4

11/5

7/4

nm

Closed-loop linearity

0.05/-

0.05/-

0.1/-

0.15/-

0.1/-

0.1/-

%F.S

Repeatability

0.02/-

0.02/-

0.05/-

0.1/-

0.05/-

0.05/-

%F.S

Pitch/Yaw/Roll

<10

<10

<15

<15

<10

<15

μrad

Unloaded resonant frequency

230

220

150

100

X180/Y230

X230/Y180/Z150

Hz±20%

Closed/open-loop unloaded Step time

10/0.8

10/0.8

15/1.6

30/2.4

15/0.8

30/0.8

ms±20%

Unloaded operating frequency

10% Travel

100

100

50

30

100

50

Hz±20%

100% Travel

9

10

5

3

9

5

Load capacity

0.8

0.8

0.5

0.4

0.7

0.6

kg

Capacitance

1.8

1.8

3.6

5.4

1.8/axis

1.8/axis

μF±20%

Material

Steet, Aluminum

Mass

140

140

200

260

200

260

g±5%