Amplified Piezo Actuators displacement to 500um for Micro Imaging
The amplified piezo actuator is an actuator that amplifies and outputs the displacement generated by low-voltage piezo stacks preloaded by a mechanical amplifying structure.
The amplified structure is an mechanical shell, and its material is generally steel. In addition to providing optimized pre-tightening force for piezo stacks, it also protects piezo stacks from tensile forces that can cause irreversible or even fatal damage to piezo stacks. The mechanical amplified structure also provides the user with mechanical interface, easy to integrate.
Characteristics
• 30μm to 2mm travel
• Blocking force to 540N
• Unloaded resonant frequency to 3900Hz
• Nanoscale resolution
Principle
Piezo stacks produce deformation and displacement along the main axis, that is, the long axis direction, and the elliptical mechanical structure amplifies and outputs the displacement along the short axis direction.
Application
Probe scanning, optical mirrors positioning, optical switch, shutter, wafer testing, astronomy, focus positioning, laser cavity tuning, fiber coupling and deformation, FBG deformation, chopper, interferometer, piston machining, damping, dynamic control, valves, inkjet technology, droplet generators, etc.
Type A Technical Data
Type:500R7
Active axes:x
Stroke [μm]±20%:500
Blocking force [N]:15.0
Stiffness [N/μm]±20%:0.03
Unloaded resonant frequency[Hz]±20%:260
Material: steel
Sensor: optional
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