Lobster200Z300S-T0X5-V Wafer Robot

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Lobster series 200Z300S-T0X5-V wafer handling productsis a single-armed wafer transfer robot with advanced wafer handling equipment. It is a vaccum model with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.

Features of Lobster200Z300S-T0X5-V Wafer Robot

Single-armed; payload is 0.5kg;

3-degrees-of-freedom;

Repositioning accuracy reaches ±0.1mm;

Cleanliness reaches ISO Class1.

For more information about wafer handling system, please feel free to contact us!

ROBOTPHOENIX, as an excellent robotics and automation companies, offers a wide range of automation roboticsfor you to choose from.

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