Lobster200Z300S-T0X5-V Wafer Robot
Lobster series 200Z300S-T0X5-V wafer handling productsis a single-armed wafer transfer robot with advanced wafer handling equipment. It is a vaccum model with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.
Features of Lobster200Z300S-T0X5-V Wafer Robot
Single-armed; payload is 0.5kg;
3-degrees-of-freedom;
Repositioning accuracy reaches ±0.1mm;
Cleanliness reaches ISO Class1.
For more information about wafer handling system, please feel free to contact us!
ROBOTPHOENIX, as an excellent robotics and automation companies, offers a wide range of automation roboticsfor you to choose from.
在线联系供应商
Other supplier products
 |
BAT2000M-S15 Delta Robot | This high speed delta robothas the strong power and the superior operational efficiency of agile with high speed. The high positioning accuracy is ... |
 |
6-Axis Collaborative Robot | The self-developed Mantis series 6 axis delta robotis designed for complex applications which require multi-degree-of-freedom. This 6 axis robot mi... |
 |
Robotphoenix Articulated Robot | An articulated robot, also known as joint robotic arm or multi-joint robot, is one of the most common models of industrial robots in today's indust... |
 |
BAT1300B-S50 Heavy Load Delta Robot | Bat1300B-S50 delta robot is a 2-axis parallel robot with a rated payload of 50kg, which has the characteristics of high speed and precision, small ... |
 |
Robotphoenix Wafer Handling Robot | Based on the pioneering technology of intelligent high-speed parallel delta robot, Robotphoenix invented new 4-DOF parallel semiconductor wafer h... |
Same products
 |
GE FANUC PLC Module IC693MDL340 | 卖方: CW Green Tech | GE FANUC PLC Module IC693MDL340 The IC693MDL340 is a 120 volt, 0.5 Amp AC Output Module of the S... |
 |
Delta Robot | 卖方: Robotphoenix LLC | With competitive delta robot costbat series delta robot pick and place has great advantages in op... |
|
|
BAT2000M-S15 Delta Robot | 卖方: Robotphoenix LLC | This high speed delta robothas the strong power and the superior operational efficiency of agile ... |
 |
BAT1600-S6 Delta Robot | 卖方: Robotphoenix LLC | Bat1600-S6 delta robot is a 4-axis parallel robot with a rated payload of 6kg, which has the char... |
 |
BAT1300-S6 Delta Robot | 卖方: Robotphoenix LLC | Bat1300-S6 delta robot is a 4-axis parallel robot with a rated payload of 6kg, which has the char... |
