Lobster200Z300S-T0X5-V Wafer Robot
Lobster series 200Z300S-T0X5-V wafer handling productsis a single-armed wafer transfer robot with advanced wafer handling equipment. It is a vaccum model with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.
Features of Lobster200Z300S-T0X5-V Wafer Robot
Single-armed; payload is 0.5kg;
3-degrees-of-freedom;
Repositioning accuracy reaches ±0.1mm;
Cleanliness reaches ISO Class1.
For more information about wafer handling system, please feel free to contact us!
ROBOTPHOENIX, as an excellent robotics and automation companies, offers a wide range of automation roboticsfor you to choose from.
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