Ultra-High Vacuum Systems
Ultra-High Vacuum Systems
It supports Magnetron Sputtering for ITO Film and Seed Layer Based Process.
Working Principles
Ion Bombardment: Plasma ions accelerate toward a target, dislodging atoms by momentum transfer.
Magnetic Confinement: Magnetic fields trap electrons near the target, increasing plasma density and reducing ionization losses.
Reactive Sputtering: Introduction of reactive gases (e.g., O₂, N₂) allows for compound film deposition (oxides, nitrides).
Thermal Efficiency: The target remains relatively cool, which supports deposition of high-melting-point materials without excessive heating.
UHV Chamber & System Characteristics
The system supports multiple UHV sputtering chambers plus a load-lock chamber for efficient sample loading.
Base pressure can reach ≤ 3 E-9 Torr, enabling ultra-clean film growth.
Process temperature range spans from room temperature up to 900 °C, enabling thermal processing or elevated-temperature depositions.
Modular chamber architecture supports multi-layer structures, such as Nb/Al-AlOx/Nb, Al/AlOx/Al, or even α-Ta/TaOx/α-Ta junctions.
Wafer Transfer: Highly reliable and repeatable substrate transferring capability
Uniformity: Sheet Resistance Uniformity 1 Sigma NU%<±5% (4 inch wafer with 5 mm removal from the edge)
Отправить запрос, связаться с поставщиком
Другие товары поставщика
 |
Atomic Layer Deposition for Industry | Atomic Layer Deposition for Industry |
 |
Powder ALD Tool | Powder ALD Tool This system provides Atomic Layer Deposition for the cathode and anode materials used in new-energy batteries such as lithium-... |
 |
Atomic Layer Deposition for R&D | Atomic Layer Deposition for R&D Material Compatibility: Oxides: Al₂O₃, SiO₂, TiO₂, ZnO, ZrO₂, HfO₂, Ta₂O₅, MgO, etc. N... |
|
|
Ultra-High Vacuum Systems | Ultra-High Vacuum Systems It supports Magnetron Sputtering for ITO Film and Seed Layer Based Process. Working Principles Ion... |
 |
Thin Film Deposition System | Thin Film Deposition System Industrial Products Industrial products are designed for mass production and manufacturing applications. ZLD's ... |
Похожие товары
 |
Anti-static PET Film | Продавец: 00000 | Anti-static PET Film Anti-static PET Film is a professional manufacturer and supplier of an... |
 |
PET Siliconized Release Liner | Продавец: 00000 | PET Siliconized Release Liner is a type of film that is used as a backing material in the pr... |
 |
BOPP Film | Продавец: 00000 | BOPP Film Details of Clear/Transparent BOPP Film (short for "Biaxially Oriented Polypropy... |
 |
pet film supplier | Продавец: 00000 | pet film supplier As one of the earliest film manufacturers in China, has the state-of-art e... |
 |
pet liner | Продавец: 00000 | pet liner A is a silicone free release liner. With a very smooth touch and a slight gloss, i... |
