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Boron Trichloride, BCL3 Specialty Gas

Product Description

Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammable, irritating, acidic odor.

is a low vapor pressure gas. The molecule can be used in a wide range of applications, such as drying etching gases used for aluminum wiring in semiconductor and LCD manufacturing. Boron trichloride is a liquefied gas that decomposes in water into hydrogen chloride and boric acid. It is the main gas component in high-K and metal anisotropic plasma etching, atomic layer etching and pulsed plasma etching. BCL3 Gas is also mainly used for fine etching of aluminum circuits in the liquid crystal panel manufacturing process.

CAS No.

10294-34-5

UN No.

1741

EINECS No.

233-658-4

Molecular weight

Appearance

colorless fuming liquid or gas with a pungent and sour taste

Melting point

-107.3℃

Boiling point

Density

DOT Class

Label

Toxic Gas, Corrosives

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