Boron Trichloride, BCL3 Specialty Gas
Product Description
Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammable, irritating, acidic odor.
is a low vapor pressure gas. The molecule can be used in a wide range of applications, such as drying etching gases used for aluminum wiring in semiconductor and LCD manufacturing. Boron trichloride is a liquefied gas that decomposes in water into hydrogen chloride and boric acid. It is the main gas component in high-K and metal anisotropic plasma etching, atomic layer etching and pulsed plasma etching. BCL3 Gas is also mainly used for fine etching of aluminum circuits in the liquid crystal panel manufacturing process.
|
CAS No. |
10294-34-5 |
|
UN No. |
1741 |
|
EINECS No. |
233-658-4 |
|
Molecular weight |
|
|
Appearance |
colorless fuming liquid or gas with a pungent and sour taste |
|
Melting point |
-107.3℃ |
|
Boiling point |
|
|
Density |
|
|
DOT Class |
|
|
Label |
Toxic Gas, Corrosives |
We offer a variety of to meet a wide range of needs
Send product request
Other supplier products
| Hydrogen Chloride, HCL Specialty Gas | is a colorless gas with a pungent odor, which is highly irritating to the upper respiratory tract and corrosive to eyes, skin and mucous membrane... | |
| Sulfur Tetrafluoride, SF4 Specialty Gas | Sulfur tetrafluoride is an inorganic compound and the most effective selective organic fluorinating agent widely used at present. It has an irrep... | |
| Calibration Gas, Mixture Gas | Product Description standards are manufactured using advanced weight and volume tools, scales and high sensitivity instruments. Multiple cylinde... | |
| Hydrogen, H2 Industrial Gas | Product Description Hydrogen (H2 ) is a highly flammable gas produced by separating it from water and fossil fuels. We offer hydrogen in a varie... | |
| Boron Trifluoride, BF3 Specialty Gas | is a colorless gas witha strong smell at room temperature. It doesnot bum or support combustion. Itis 1.3times heavier than air and produces whit... |
Same products
| Boron Trichloride, BCL3 Specialty Gas | Seller: Chengdu Taiyu Industrial Gases Co., Ltd | Product Description Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammabl... | |
| Polisorbato 80 | Seller: GUANGDONG RUNHUA CHEMISTRY CO., LTD. | polysorbate 80 en español, también conocido como monooleato de Sorbitol de polioxie... | |
| Low Pressure Gas Regulator | Seller: Ningbo Shuai Xian Regulator Co., Ltd | Low pressure gas regulatorreduces high pressure from the gas bottle to a consistent regulated pre... | |
| Isobutane, I-C4H10 Industrial Gas | Seller: Chengdu Taiyu Industrial Gases Co., Ltd | Product Description Isobutane is an organic compound with the , which is a colorless flammable... | |
| Hydrogen Sulfide, H2S Specialty Gas | Seller: Chengdu Taiyu Industrial Gases Co., Ltd | Product Description is an inorganic compound that is a flammable acid gas at standard conditio... |















