R-PLANE (1-102) SAPPHIRE WAFERS
R plane(1-102) sapphire wafers are preferred for the hetero-epitaxial deposition of silicon used in microelectronic IC applications. R plane is the non-polar plane of sapphire. So the different positions of R-plane in sapphire devices, the mechanical, thermal, electrical and optical properties of sapphire devices will vary greatly, which will also affect the subsequent processing performance, processing efficiency and processing yield of sapphire devices.
In order to make the crystal structure of sapphire ingot and subsequent sapphire products consistent, the more common method is to process an A-direction surface on the sapphire ingot as the flat orientation of sapphire wafer (subsequent sapphire products), so that the R-direction position of sapphire ingot and the wafer is consistent.
Specifications of R Plane SapphireWafers
|
Item |
2 -inch R-plane(1-102) 430μm Sapphire Wafers |
|
|
Crystal Materials |
99,999%, High Purity, Monocrystalline Al2O3 |
|
|
Grade |
Prime, Epi-Ready |
|
|
Surface Orientation |
R-plane(1-102) |
|
|
Diameter |
||
|
Thickness |
430 μm +/- 25 μm |
|
|
Primary Flat Orientation |
45 +/- 1deg. counter-clockwise from C-axis projection on R-plane |
|
|
Primary Flat Length |
||
|
Single Side Polished |
Front Surface |
Epi-polished, Ra < 0.5 nm (by AFM) |
|
(SSP) |
Back Surface |
Fine ground, Ra = 0.8 μm to 1.2 μm |
|
Double Side Polished |
Front Surface |
Epi-polished, Ra < 0.5 nm (by AFM) |
|
(DSP) |
Back Surface |
Epi-polished, Ra < 0.5 nm (by AFM) |
|
TTV |
< 10 μm |
|
|
BOW |
< 10 μm |
|
|
WARP |
< 10 μm |
|
|
Cleaning / Packaging |
Class 100 cleanroom cleaning and vacuum packaging, |
|
|
25 pieces in one cassette packaging or single piece packaging. |
||
Note: Custom sapphire wafers with any orientation and any thickness can be provided.
CRYSCORE can provide standard or custom sapphire waferswith any orientation applied to epitaxy, as well as sapphire windowswith any specifications applied to optics. Patterned sapphire substratesand sapphire ingots also can be provided. Expert in sapphire optics manufacturing.
Send product request
Other supplier products
 |
SILICON ON SAPPHIRE | A Brief Introduction of Silicon on Sapphire Technology Silicon on sapphire (SOS) technology is a hetero-epitaxial process for metal-oxide-semicondu... |
 |
A-PLANE (11-20) SAPPHIRE WAFERS | A plane sapphirewafers have a uniform dielectric constant and highly insulating characteristic, so they are generally used for hybrid microelectron... |
 |
A-PLANE (11-20) SAPPHIRE WAFERS | A plane sapphirewafers have a uniform dielectric constant and highly insulating characteristic, so they are generally used for hybrid microelectron... |
 |
SAPPHIRE WAFERS / SAPPHIRE SUBSTRATES | Due to the less mismatched lattice and stable chemical and physical properties, sapphire(Al2O3) wafer is the popular substrates for III-V nitrides,... |
 |
Sapphire Windows | As a professional sapphire wafermanufacturer, CRYSCORE can provide standard or optical sapphirewafers with any orientation applied to epitaxy, as w... |
Same products
 |
all kinds of Precious Metals | Seller: O&K GROUP LIMITED | Okwishing supplies all kinds of Precious Metals. Okwishing () is a cross-border e-commerce platf... |
 |
Natural paving stones | Seller: Hebei Jinkui Stone Co., Ltd | Pebble paver stones, also known as pebble paving, are a type of decorative stone used for outdoor... |
 |
Colombia Color Pear Cut Lab Grown Emerald | Seller: Guangxi Wuzhou Starsgem Co., Ltd | Colombia Color Pear Cut Lab Grown Emerald Product Description Material Lab grown e... |
 |
STANDARD SAPPHIRE WAFERS (C-PLANE) | Seller: CRYSCORE OPTOELECTRONIC LIMITED | CRYSCORE can offer Epi-Ready grade sapphire wafer with a very low surface roughness in complete o... |
 |
SAPPHIRE WINDOWS | Seller: CRYSCORE OPTOELECTRONIC LIMITED | Sapphire has a wide transmission range, spanning the three wavelength bands of ultraviolet, visib... |
