Photoresist Thinner
Photoresist Thinner
Thinner
Thinner is a chemical commonly used in semiconductor manufacturing to adjust the concentration and viscosity of photoresist to meet process requirements.
Description
is a chemical commonly used in semiconductor manufacturing to adjust the concentration and viscosity of photoresists to meet process requirements. The main components of photoresist diluent include organic solvents and additives. The photoresist is a polymer that is generally insoluble in water, so an organic solvent is needed as a medium to dilute the photoresist. Organic solvents can effectively disperse the photoresist, making it easy to coat on the substrate and easy to remove after exposure.
According to different resin systems and line width requirements, such as G (436nm) line, I (365nm) line, KrF (248nm) line, EUV (13.5nm) line, etc., our company has corresponding formulas, adding solubilizers, antireflective agents, surfactants, and antioxidants developed by our company, which have good performance.
Main uses of diluents in semiconductor manufacturing
1. Photoresist dilution:
In the photolithography process, the viscosity of the photoresist needs to be adjusted according to the specific process requirements. Diluents are used to dilute the photoresist to make it easier to spin-coat on the wafer surface to form a uniform film.
For example, during the coating process, diluents can reduce the viscosity of the photoresist to ensure that it can be evenly distributed during spin coating.
2. Equipment cleaning:
Diluents are used to clean coating equipment, developing equipment, and other process equipment to remove residual photoresist or other chemicals.
For example, after coating, diluents are used to clean the nozzles and pipes of the coating machine to prevent the photoresist from solidifying and clogging the equipment.
3. Chemical concentration adjustment:
In some processes, diluents are used to adjust the concentration of chemicals to meet specific process requirements.
For example, in wet etching or cleaning processes, diluents can be used to adjust the concentration of etching solution or cleaning solution.
4. Stripping:
After the photolithography process is completed, diluents can be used to remove photoresist from the wafer surface.
For example, in some degumming processes, a diluent is mixed with the degumming solution to improve the degumming efficiency.
Send product request
Other supplier products
 |
TMAH Developer | TMAH Developer TMAH Developer is a commonly used developer, and its main component is tetramethylammonium hydroxide. TMAH is an organic base ... |
 |
KOH Developer | KOH Developer Description The main components of , KOH, surfactant and metal protective agent, can dissolve the uncured part of the photoresi... |
|
|
Photoresist Thinner | Photoresist Thinner Thinner Thinner is a chemical commonly used in semiconductor manufacturing to adjust the concentration and viscosity of p... |
 |
Photoresist Ancillaries | Photoresist Ancillaries refer to a range of chemicals and materials used in conjunction with photoresists during the lithography process in se... |
 |
High Purity Solvents | High Purity Solvents in semiconductor materials refer to chemical solvents that have undergone rigorous purification and have extremely high p... |
Same products
 |
KL‑98 Professional Laboratory pH/ORP/Temperature Tester | Seller: Kelilong Electron Co.,Ltd | Product Description: The PH‑98 meter is an easy‑to‑operate, multi‑functional microprocessor‑ba... |
 |
KL‑98 Professional Laboratory pH/ORP/Temperature Tester | Seller: Kelilong Electron Co.,Ltd | Product Description: The PH‑98 meter is an easy‑to‑operate, multi‑functional microprocessor‑ba... |
 |
Procaine | Seller: 862043 | CAS:59-46-1 |
 |
High Concentration Plastic Color Masterbatch Factory Direct Supply | Seller: 861445 | We are a professional color masterbatch manufacturer with years of R&D experience in plastic ... |
 |
Acid Ink Blue G Factory | Seller: TIANJIN LEADING IMPORT & EXPORT CO., LTD | Acid Ink Blue G Factory 【Application of Acid Ink Blue G 】 mainly used for making blue or ... |
