4 INCH C-PLANE(0001) SAPPHIRE WAFERS
Wafer saphiris being used extensively as a substrate for III-V nitrides and for many other epitaxial films. We supply 99.999% high purity sapphire wafers with an excellent surface finish to meet your rigorous requirements.
Specifications of 4 Inch C-plane(0001) Sapphire Wafer
Item |
4-inch C-plane(0001) 650μm Sapphire Wafers |
|
Crystal Materials |
99,999%, High Purity, Monocrystalline Al2O3 |
|
Grade |
Prime, Epi-Ready |
|
Surface Orientation |
C-plane(0001) |
|
C-plane off-angle toward M-axis 0.2 +/- 0.1° |
||
Diameter |
||
Thickness |
650 μm +/- 25 μm |
|
Primary Flat Orientation |
A-plane(11-20) +/- 0.2° |
|
Primary Flat Length |
||
Single Side Polished |
Front Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
(SSP) |
Back Surface |
Fine ground, Ra = 0.8 μm to 1.2 μm |
Double Side Polished |
Front Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
(DSP) |
Back Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
TTV |
< 20 μm |
|
BOW |
< 20 μm |
|
WARP |
< 20 μm |
|
Cleaning / Packaging |
Class 100 cleanroom cleaning and vacuum packaging, |
|
25 pieces in one cassette packaging or single piece packaging. |
Note: Custom c axis sapphirewith any orientation and any thickness can be provided.
If you want to know more about custom sapphire optics, please contact us.
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